The Eitzenberger EZ-0745 air- bearing ZC-Axis is intended for integration into an XY-stage (e.g. EZ-0715). Due to the highly integrated design, only a low overall height of approx. 138 mm is required.
The rotation angle is limited to ± 3°. A high repeatability of ± 1.5 μrad enables very precise alignment of the substrate. The Z-axis is secured against rotation via 2 air bearing pads and is dynamically driven by 2 opposing voice coils. An air-bearing pneumatic cylinder is integrated for weight decoupling. An individual, customer-specific adjustment of the Z-stroke is possible.
Applications: High-precision positioning tasks, scanning, exposure, laser engraving, laser processes in general.
Key Features
- Linear Axis for Vertical Installation
- Rotation Angle ±3°
- Max. Load 10 kg
- Integrated Weight Compensation
- Absolute Linear Encoder
- Dynamic Drive by Voice Coils
- Integrable in X/Y Stages (e.g. EZ-0715)
Download EZ-0745-ZC Datasheet