The piezosystem jena PZ 250 CAP WL was developed for the precise positioning of semiconductor wafers with diameters up to 12”.
In closed-loop operation the actuator offers motion in Z direction of 250 μm. Equipped with a capacitive sensor that overcomes hysteresis and drift, single steps in nanometers can be achieved. Specified positions can be held with high stability for a long periods. Due to its high stiffness, the PZ 250 CAP WL can carry loads up to 3 kg.
The PZ 250 CAP WL is well suited for applications in the semiconductor industry, solar panel production, lithography, and mask inspection.
- positioning in millisecond range
- steps in the single digit nanometer range
- stable positioning of a few nanometers
- very high repeatability
Download datasheet here.
Specifications:
| UNIT | PZ 250 CAP WL | |
|---|---|---|
| Part # | S-627-51 D | |
| Axis | Z | |
| Motion in Open-Loop (±10%)* | μm | 350 |
| Motion in Closed-Loop* | μm | 250 |
| Resolution** | nm | 3 |
| Dimensions (L x W x H) | mm | 400 x 380 x 20 |
| Weight | g | 2500 |
*Typical value measured with a 30DV50 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.