SIOS SP 5000 TR triple beam laser interferometers are precision length measuring instruments that combine three interferometers in one device. All three measuring channels are fed by one light source with the same highly stable laser frequency. Thus, three length values can be measured simultaneously with nanometer accuracy. From the difference between two length values and the calibrated beam distance, the corresponding angle can be determined with high resolution and high precision.

Many application areas in industry and research require highly precise simultaneous displacement and angle measurements. The simultaneous acquisition of the pitch and yaw angles as well as the length measurement, during the movement of the carriage on which the triple reflector unit is fixed, makes it possible to evaluate motion axis quickly and with high precision. Fast and uncomplicated sensor adjustment is particularly important here.

The interferometer system has a modular design and can thus be adapted to a wide variety of measurement tasks.

The fiber optic coupling of the sensor head and the optionally integrated beam direction detection support easy handling and precise adjustment.

The design of the SP 5000 TR triple beam interferometer is compact and robust. This makes it ideal for high-precision measurements in industry and research. Versions as OEM instrument also for use in vacuum are available on request.

For large measuring ranges or calibrations of large objects, the use of wireless radio temperature sensors or the LCS precision climate measuring station is recommended.


Download technical datasheet here.

  • flexible length measuring system of highest accuracy
  • easy handling and adjustment due to integrated beam direction detection
  • various optical reflectors can be used, e.g. spherical, plane mirror reflector
  • permissible tilting of the measuring reflector up to ± 12.5°
  • compact design
  • design of the sensor head optionally in aluminum, stainless steel or invar
  • beam distance: 12 mm
  • OEM versions, OEM software and vacuum version are possible
  • beam deflection with an optionally available adjustable deflection mirror
  • extended range of applications through optional interfaces
  • extensive trigger options
  • calibration software according to the currently valid standards

Areas of application

  • laser interferometric measurements on guides, measuring, microscope and positioning stages
  • high-precision pitch and yaw angle correction for two- or multi-coordinate measurements
  • calibration of measuring machines and machine tools
  • differential measurements (dilatometry, materials testing)
  • dynamic angle measurements, acquisition of angular oscillations
  • extension of the measuring range for angle measurement on request

Ideal for

  • quality control 
  • calibration
  • development
  • science / research
  • OEM applications