SIOS SP 5000 DS double-beam laser interferometers are used for measuring tasks that require simultaneous acquisition of an angle of motion in addition to length information.

The measuring principle of this interferometer is based on the SP 5000 NG measuring device.

Two measuring laser beams use the light of a common laser with the same frequency. The beam spacing between the two measuring beams is calibrated with high precision. The parallelism of the measuring beams to each other is of great importance. If both beams use a common reflector, the angle can be measured and calculated with high resolution in motion by forming the difference. 

If the two beams are operated independently of each other, differential measurements can be performed. For particularly high demands on the long-term stability of the differential measurement, we recommend the SP 5000 DI series interferometer. Measurement tasks that require the simultaneous acquisition of another angle can be performed with the three-beam SP 5000 TR interferometer.

  • flexible length measuring system of highest accuracy
  • angle detection with highest accuracy
  • easy adjustment and handling
  • various optical reflectors can be used, e.g. spherical, plane mirror reflector
  • permissible tilting of the measuring reflector up to ± 12.5° 
  • compact design
  • sensor head is available in aluminum, stainless steel or invar
  • Beam distance: 12 mm standard, others on request
  • OEM versions, OEM software and vacuum version are possible
  • extensive trigger options

Download technical data sheet here.

Measuring Principle of the SP 5000 DS:

Areas of application

  • simultaneous measurement of displacement and angle
  • as feedback measuring system for plane tables in combination with other interferometers
  • differential measurements for material tests 
  • differential vibration measurements using attachment optics

Ideal for

  • quality control
  • calibration
  • development
  • science / research
  • OEM applications

Metrology