SIOS Laserinterferometric Vibrometers

The design of these devices is based on the proven concept with our SP-series miniature interferometer. The sensor head of the vibrometer is equipped with additional optics, which enables measurements on surfaces of any roughness.


  • Displacement measurements in the frequency range 0 – 5 MHz

  • Measurement through narrow windows are possible

  • Vibration measurement software for Windows

Applications: High precise measurement of vibrations and length

Vibrometer with fixed focal length

Datasheet download here

Vibrometer with variable focal length

Datasheet download here

Nano Vibration Analyzer:

The Nano Vibration Analyzer is a fiber-coupled laserinterferometric vibrometer integrated in a precision technical microscope.


  • Noncontact vibration measurements on micro objects

  • Flexible sample positioning

  • Different changeable objectives

  • USB-camera for observation of measuring objects

Application: Noncontacting vibration measurements on micro objects, MEMS and cantilevers

Datasheet download here