- Excitation signal: User-programmable waveform shapes
- Time Domain: Mega-data-points resolution 4D topography time-sequences
- Frequency Domain: Mega-pixels vibration maps, bandwidth up to 200 MHz.
- Environmental control: Temperature, pressure, humidity, gas, liquid, etc.
It provides at each time-point:
3D surface topography with a million of data-point resolution
profile cut, giving precise information of surface deformation
absolute vertical position at any point of the measured surface
(no need of pre-defined measurement grid).
optimal optical imaging quality
fast and intuitive measurement
friendly user software interface
comprehensive data analysis
Read more on the Lyncée Tec DHM Reflection Series here.
Unlike systems measuring the displacement of a single point on the surface of a sample, DHM®‘s unique non-scanning technique measures time-sequence of the sample surface with 3D topographies at mega pixel resolution. Indeed, each individual measurement is acquired simultaneously over the full field of view, providing at each time-point a million of data-points. This unrivaled wealth of information reveals very quickly and efficiently MEMS response to any excitation signal with unprecedented details.
Time Domain Measurements
The stroboscopic unit electronics precisely samples the measurement of topographies along the excitation waveform. It allows to acquired time-sequence of up to 32’768 3D measurements at a bandwidth of up to 200 MHz.
Using DHM, the time domain time-sequence measurement of the response of a CMUT to a burst excitation provides:
- 3D surface topography versus time (Fig 1)
- Animated profile cut, at any coordinates of the sample. In the application of Fig 1, it provides precise information of membrane deformation.
- Absolute vertical position (and therefore displacement) of any point of the surface of the sample (Fig 2)
As an illustration this application presents a cMUT membrane transient response to a burst excitation signal. Both time and frequency domains analysis characterization are presented. Such analysis can be further applied to arrays of cMUT and pMUT membranes, as well as to other transducers such as inertial sensors, optical and mechanical switches, MEMS microphones, among others.
Excitation waveform specifications – transients
Lyncée’s stroboscopic unit allows users to define any arbitrary excitation waveform with a resolution of 215 points. The strobe electronics generates this waveform and synchronizes very precisely the 3D topography measurements with it (detailed specifications).
Therefore, excitation waveforms not only include “simple” signals such as Sine, Square, Triangle, Trapezoid, or Saw tooth but also, among others, impulses and bursts, enabling to investigate damping and respectively transient processes.