Many applications in industry and research require high-precision simultaneous displacement and angle measurements. Fast set-up and easy adjustment are particularly important.
SIOS Triple-beam laser interferometers are precision length measuring devices that combine three interferometers in one device. The same highly stable laser frequency is used in all three measuring channels. Thus, three length values can be measured simultaneously with sub-nanometer accuracy. The corresponding angle can be determined with high precision from the difference between two length values and the calibrated beam distance. The system has a modular design and can therefore be adapted to a wide variety of measurement tasks. The interferometer has a measuring range of more than 5 m and a sub-nanometer resolution. For measurements with a reflector, the angle measuring range up to ±12,5° is possible.
The fiber optic coupling of the sensor head and the optionally integrated beam direction detection support easy handling and adjustment.
The design of the three-beam interferometer is compact and robust. This makes it ideal for high-precision measurements in industry and research and as an OEM instrument.
For large measuring ranges or calibration tasks, the use of wireless temperature sensors or the climate measuring station LCS is recommended.