Reflection DHM® measures the reflected wavefront from the sample, i.e. the surface topography in case of purely reflecting sample.

DHM®is more than a standard optical profilometer as it enables dynamic measurement within vertical ranges from nanometers to hundreds of microns with sub-nanometric vertical resolution.

Applications :

  • Surface topography
  • Surface finish
  • Defect inspection
  • Structured thin film
  • MEMS measurement