DHM - R1000 Holographic Reflection Microscope


Fast and robust nanometric surface topography

The DHM R1000 is a reflection configuration microscope. It is suitable for totally and partially reflecting objects. Its ability to work with low reflective interfaces (down to 1% reflectivity), makes it the ideal tool for rapid inspection and accurate surface topography measurements on a large variety of samples.

As a result of its very high vertical resolution better than 1 nanometer, DHM R1000 is particularly suited for applications on smooth and polished surfaces with an averaged roughness of less than 0.2 µm. For higher averaged roughnesses, DHM performances depend on the specimen geometry, and on the desired measurements. Vertical scanning, available as an option, allows the vertical measurement range to be increased, but with a decreased vertical resolution.

Thanks to its high acquisition rate and ease of use, DHM R1000 allows rapid routine inspections, automated industrial quality control as well as R&D applications, particularly for dynamic observations. Stroboscopic synchronisation is available as an option and enables characterization of high frequency periodic motions.


Its application fields includes:

  Industrial metrology   MEMS & MOEMS
  Micro optics   Roughness measurements
  Surface analysis   Unlabelled biochips quality control
  Micro injection   Semiconductors
  Material science   ...

The set-up configuration allows a standard optical microscope objective to be mounted on the DHM R1000. Select the objective that fulfils the field of view and lateral resolution that you need.

The DHM R1000's possibilities are revealed by the Lyncée Tec patented Koala Software that interprets the acquired hologram.   


DHM 1000 Family brochure (.pdf 1.2 MB) 

Real-time imaging

The acquisition and digital reconstruction rate (15 fps standard, faster in option) allows real-time imaging. Dynamic event viewing and active interaction with the observed phenomena are therefore possible.

Robust & stable

The short acquisition time (a few micro-seconds) makes the method almost insensitive to external vibrations and makes a vibration isolation table unnecessary. The robustness and stability of DHM™ permit stable measurements over long time periods to detect weak and slow deformations or movements.

High resolution

Interferometric axial resolution, less than 1 nanometer, along the vertical (Z) axis. Transverse resolution (in XY plane) defined by the numerical aperture of the objective (up to 300nm with oil immersion objectives), as with classical optical microscopy.

Non-contact & strictly non-invasive

Low-power visible light sample illumination (at least 10'000x less than confocal microscopy), no contact with the specimen surface, DHM™ ensures total preservation of your sample characteristics. Moreover, biological specimens can be observed without contrast agents, thus suppressing any type of chemical or physical disturbance.

Cost effective solution

DHM™ instruments have very low installation and operating costs. Adaptability and flexibility makes them very competitive in the high resolution microscopy domain. All these features make DHM™ instruments cost effective tools for R&D and quality control in production.


No sample preparation, no specific environments (temperature, vacuum, ...), no high precision positioning or orientation of the sample, the simplicity of DHM™ techniques makes it a user-friendly tool for quick and reliable measurements.

Powerful 3D software

Permits different operating modes with the same instrument to broaden the range of your applications. Offers unique DHM™-specific digital tools that improves the instrument's ease of use and robustness, as well as the measurement accuracy and stability. Implements standards and advanced measurements interfaces and external control possibilities in a convivial and flexible environement.

All together, above mentioned features define an instrument offering unique possibilities for microscopy and metrology.